Technion
16/01/2018 Last updated: 11:04:47
ToolStatusComment
Au evaporatorIDLENo reservations for next 12 hours
Al evaporatorIDLENo reservations for next 12 hours
PECVDIDLENo reservations for next 12 hours
RIERunning/in processNot final
BTI furnace leftMaintenanceNot final
BTI furnace rightMaintenanceNot final
ICP chlorineIDLENo reservations for next 12 hours
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLE16/01/2018 13:30 Cecile Saguy
SEM01IDLENo reservations for next 12 hours
SEM02IDLENo reservations for next 12 hours
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIERunning/in processNot final
RTAMaintenanceNot final
ALDRunning/in processNot final
Stepper GCAMaintenanceNot final
SUSS CoaterIDLENo reservations for next 12 hours
SUSS DeveloperIDLENo reservations for next 12 hours
SUSS HMDSIDLENo reservations for next 12 hours
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWNO CONNECTION (IDLE)No reservations for next 12 hours
Evatec EvaporatorIDLENo reservations for next 12 hours
Edwards evaporationMaintenanceNot final
AFM Old 3000 DIIDLENo reservations for next 12 hours
Laser WriterBYPASS (IDLE)No reservations for next 12 hours