Technion
25/09/2020 Last updated: 00:41:03
ToolStatusComment
Au evaporatorIDLENo reservations for next 12 hours
Al evaporatorIDLENo reservations for next 12 hours
PECVDMaintenanceNot final
RIEMaintenanceNot final
BTI furnace leftMaintenanceNot final
BTI furnace rightMaintenanceNot final
ICP chlorineMalfunction 
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLENo reservations for next 12 hours
SEM01IDLENo reservations for next 12 hours
SEM02Running/in processNot final
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIEIDLENo reservations for next 12 hours
RTAIDLENo reservations for next 12 hours
ALDIDLENo reservations for next 12 hours
Stepper GCAMaintenanceNot final
SUSS CoaterMaintenanceNot final
SUSS DeveloperMaintenanceNot final
SUSS HMDSMalfunction 
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWIDLENo reservations for next 12 hours
Evatec EvaporatorMaintenanceNot final
Edwards evaporationMaintenanceNot final
AFM Old 3000 DINO CONNECTION (IDLE)No reservations for next 12 hours
Laser WriterMalfunction