Technion
16/06/2019 Last updated: 16:59:07
ToolStatusComment
Au evaporatorNO CONNECTION (IDLE)No reservations for next 12 hours
Al evaporatorNO CONNECTION (IDLE)No reservations for next 12 hours
PECVDIDLENo reservations for next 12 hours
RIEIDLENo reservations for next 12 hours
BTI furnace leftNO CONNECTION (Maintenance)Not final
BTI furnace rightNO CONNECTION (Maintenance)Not final
ICP chlorineMaintenanceNot final
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLENo reservations for next 12 hours
SEM01IDLENo reservations for next 12 hours
SEM02IDLENo reservations for next 12 hours
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIEMaintenanceNot final
RTAIDLENo reservations for next 12 hours
ALDIDLENo reservations for next 12 hours
Stepper GCAMaintenanceNot final
SUSS CoaterRunning/in processNot final
SUSS DeveloperIDLENo reservations for next 12 hours
SUSS HMDSIDLENo reservations for next 12 hours
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWNO CONNECTION (IDLE)No reservations for next 12 hours
Evatec EvaporatorRunning/in processNot final
Edwards evaporationMaintenanceNot final
AFM Old 3000 DINO CONNECTION (IDLE)No reservations for next 12 hours
Laser WriterIDLENo reservations for next 12 hours