Technion
18/06/2018 Last updated: 23:47:21
ToolStatusComment
Au evaporatorIDLENo reservations for next 12 hours
Al evaporatorIDLENo reservations for next 12 hours
PECVDIDLENo reservations for next 12 hours
RIEIDLENo reservations for next 12 hours
BTI furnace leftIDLENo reservations for next 12 hours
BTI furnace rightRunning/in processNot final
ICP chlorineIDLENo reservations for next 12 hours
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLENo reservations for next 12 hours
SEM01IDLENo reservations for next 12 hours
SEM02IDLENo reservations for next 12 hours
VST evaporatorMaintenanceNot final
ICP DRIERunning/in processNot final
RTAIDLENo reservations for next 12 hours
ALDIDLE19/06/2018 08:30 Igor Krylov
Stepper GCAMaintenanceNot final
SUSS CoaterIDLE19/06/2018 09:30 Lior Gal
SUSS DeveloperMaintenanceNot final
SUSS HMDSIDLE19/06/2018 09:00 Olga Solomeshch
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWNO CONNECTION (IDLE)No reservations for next 12 hours
Evatec EvaporatorIDLENo reservations for next 12 hours
Edwards evaporationMaintenanceNot final
AFM Old 3000 DIIDLENo reservations for next 12 hours
Laser WriterBYPASS (IDLE)No reservations for next 12 hours