Technion
04/08/2021 Last updated: 16:27:52
ToolStatusComment
Au evaporatorIDLE04/08/2021 17:00 Vladimir Kleiner
Al evaporatorRunning/in processNot final
PECVDIDLENo reservations for next 12 hours
RIEIDLENo reservations for next 12 hours
BTI furnace leftIDLENo reservations for next 12 hours
BTI furnace rightMaintenanceNot final
ICP chlorineBYPASS (Malfunction) 
VINCI Thermal EvaporatorMaintenanceNot final
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLENo reservations for next 12 hours
SEM01IDLENo reservations for next 12 hours
SEM02NO CONNECTION (Not Active) 
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIEIDLENo reservations for next 12 hours
RTAIDLENo reservations for next 12 hours
ALDIDLENo reservations for next 12 hours
Stepper GCAMaintenanceNot final
SUSS CoaterMaintenanceNot final
SUSS DeveloperIDLENo reservations for next 12 hours
SUSS HMDSIDLENo reservations for next 12 hours
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWIDLENo reservations for next 12 hours
Evatec EvaporatorIDLENo reservations for next 12 hours
Edwards evaporationMaintenanceNot final
AFM Old 3000 DIIDLENo reservations for next 12 hours
Laser WriterIDLENo reservations for next 12 hours
Micro RamanIDLENo reservations for next 12 hours
Ball BonderIDLENo reservations for next 12 hours