Technion
27/10/2020 Last updated: 19:52:08
ToolStatusComment
Au evaporatorIDLENo reservations for next 12 hours
Al evaporatorIDLENo reservations for next 12 hours
PECVDIDLENo reservations for next 12 hours
RIEIDLENo reservations for next 12 hours
BTI furnace leftMaintenanceNot final
BTI furnace rightMaintenanceNot final
ICP chlorineMalfunction 
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityBYPASS (IDLE)No reservations for next 12 hours
SEM01BYPASS (IDLE)No reservations for next 12 hours
SEM02Running/in processNot final
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIEIDLENo reservations for next 12 hours
RTAIDLENo reservations for next 12 hours
ALDIDLENo reservations for next 12 hours
Stepper GCAMaintenanceNot final
SUSS CoaterIDLENo reservations for next 12 hours
SUSS DeveloperIDLENo reservations for next 12 hours
SUSS HMDSIDLENo reservations for next 12 hours
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWIDLENo reservations for next 12 hours
Evatec EvaporatorMaintenanceNot final
Edwards evaporationMaintenanceNot final
AFM Old 3000 DINO CONNECTION (IDLE)No reservations for next 12 hours
Laser WriterIDLENo reservations for next 12 hours