Technion
21/09/2018 Last updated: 17:47:46
ToolStatusComment
Au evaporatorNO CONNECTION (IDLE)No reservations for next 12 hours
Al evaporatorNO CONNECTION (IDLE)No reservations for next 12 hours
PECVDMaintenanceNot final
RIEIDLENo reservations for next 12 hours
BTI furnace leftNO CONNECTION (IDLE)No reservations for next 12 hours
BTI furnace rightNO CONNECTION (IDLE)No reservations for next 12 hours
ICP chlorineIDLENo reservations for next 12 hours
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLENo reservations for next 12 hours
SEM01IDLENo reservations for next 12 hours
SEM02Malfunction 
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIEIDLENo reservations for next 12 hours
RTAIDLENo reservations for next 12 hours
ALDIDLENo reservations for next 12 hours
Stepper GCAMaintenanceNot final
SUSS CoaterRunning/in processNot final
SUSS DeveloperIDLENo reservations for next 12 hours
SUSS HMDSIDLENo reservations for next 12 hours
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWNO CONNECTION (IDLE)No reservations for next 12 hours
Evatec EvaporatorIDLENo reservations for next 12 hours
Edwards evaporationMaintenanceNot final
AFM Old 3000 DIIDLENo reservations for next 12 hours
Laser WriterBYPASS (IDLE)No reservations for next 12 hours