Technion
22/02/2020 Last updated: 15:18:30
ToolStatusComment
Au evaporatorRunning/in processNot final
Al evaporatorIDLENo reservations for next 12 hours
PECVDIDLENo reservations for next 12 hours
RIEIDLENo reservations for next 12 hours
BTI furnace leftMaintenanceNot final
BTI furnace rightIDLENo reservations for next 12 hours
ICP chlorineIDLENo reservations for next 12 hours
VINCI Thermal EvaporatorIDLENo reservations for next 12 hours
RAITH e-beamIDLENo reservations for next 12 hours
AFM New MFP-3D InfinityIDLENo reservations for next 12 hours
SEM01IDLENo reservations for next 12 hours
SEM02IDLENo reservations for next 12 hours
VST evaporatorIDLENo reservations for next 12 hours
ICP DRIEIDLENo reservations for next 12 hours
RTAIDLENo reservations for next 12 hours
ALDMaintenanceNot final
Stepper GCAMaintenanceNot final
SUSS CoaterIDLENo reservations for next 12 hours
SUSS DeveloperRunning/in processNot final
SUSS HMDSIDLENo reservations for next 12 hours
MNFU workNO CONNECTION (IDLE)No reservations for next 12 hours
NitrogenNO CONNECTION (IDLE)No reservations for next 12 hours
EBLIDLENo reservations for next 12 hours
DICER SAWIDLENo reservations for next 12 hours
Evatec EvaporatorIDLENo reservations for next 12 hours
Edwards evaporationMaintenanceNot final
AFM Old 3000 DINO CONNECTION (IDLE)No reservations for next 12 hours
Laser WriterIDLENo reservations for next 12 hours